Surface chemical cleaning and passivation for semiconductor processing

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Bibliographic Information

Title: "Surface chemical cleaning and passivation for semiconductor processing"

Statement of Responsibility: editors, Gregg S. Higashi, Eugene A. Irene, Tadahiro Ohmi

Publisher

Publication Year

Symposium Y held during the 1993 Spring Meeting of the Materials Research Society, in San Francisco from April 13-15, 1993

Includes bibliographical references and index

CRID

1130282270423689472
NII Book ID

BA22970911
ISBN

1558992138
LCCN

93028784
Web Site

https://lccn.loc.gov/93028784
Text Lang

en
Country Code

us
Title Language Code

en
Place of Publication
- Pittsburgh, PA
Classification
- LCC: TK7871.85
- DC20: 621.3815/2
Subject
- LCSH: Semiconductors -- Design and construction -- Congresses
- LCSH: Surface preparation -- Congresses
- LCSH: Semiconductors -- Cleaning -- Congresses
- LCSH: Surface chemistry -- Congresses
Data Source
- CiNii Books