Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, R.E. Howard ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1987
Book size
24 cm

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Notes

Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting

Includes bibliographies

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