Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA

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Bibliographic Information

Title
"Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA"
Statement of Responsibility
Peisen S. Huang, chair/editor ; sponsored and published by by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2006
Book size
28 cm

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Notes

Includes bibliographical references and author index

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