High Purity Silicon 11
CiNii
Available at 1 libraries
Bibliographic Information
- Title
- "High Purity Silicon 11"
- Statement of Responsibility
- editors, E. Simoen ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2010
- Book size
- 23 cm
- Other Title
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- High Purity Silicon 11 : dielectric and semiconductor materials, devices, and processing
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Notes
Includes bibliographical references and index
"The paperes included in this issue of ECS Transactions were originally presented in the symposium "High Purity Silicon 11", held during the 218th meeting of The Electrochemical Society, in Las Vegas, Nevada from October 10 to 15, 2010."-- preface
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Details 詳細情報について
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- CRID
- 1130282270730641664
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- NII Book ID
- BB09048222
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- ISBN
- 9781607681809
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Data Source
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- CiNii Books