Mechanical properties of CMOS thin films : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of doctor of natural sciences

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Bibliographic Information

Title
"Mechanical properties of CMOS thin films : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of doctor of natural sciences"
Statement of Responsibility
presented by Volker Ziebart
Publisher
  • Hartung-Gorre
Publication Year
  • 1999
Book size
24 cm

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