Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California
Bibliographic Information
- Title
- "Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California"
- Statement of Responsibility
- Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1992
- Book size
- 28 cm
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Notes
"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. ix
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282270740776960
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- NII Book ID
- BA2630732X
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- ISBN
- 0819407267
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- LCCN
- 91067548
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- Web Site
- https://lccn.loc.gov/91067548
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TK7871.85
- DC20: 621.3815/2
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- Data Source
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- CiNii Books