Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California

Web Site CiNii 所蔵館 2館

書誌事項

タイトル
"Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California"
責任表示
Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
出版者
  • SPIE
出版年月
  • c1992
書籍サイズ
28 cm

この図書・雑誌をさがす

注記

"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. ix

Includes bibliographical references and index

関連図書・雑誌

もっと見る

詳細情報 詳細情報について

ページトップへ