MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

Name: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
Author: Motamedi, M. Edward, Göring, Rolf, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories

Motamedi, M. Edward, Göring, Rolf, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories

MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

Web Site CiNii Available at 2 libraries

Motamedi, M. Edward
Göring, Rolf
Society of Photo-optical Instrumentation Engineers
Semiconductor Equipment and Materials International
Solid State Technology (Organization)
Sandia National Laboratories

Bibliographic Information

Title: "MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA"

Statement of Responsibility: M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)

Publisher

SPIE

Publication Year

c2000

Book size: 28 cm

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Notes

Includes bibliographical references and index

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