CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications

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Bibliographic Information

Title
"CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications"
Statement of Responsibility
D. Lange, O. Brand, H. Baltes
Publisher
  • Springer-Verlag
Publication Year
  • c2002
Book size
25 cm

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Notes

Includes bibliographical references (p. [131]-140) and index

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Details 詳細情報について

  • CRID
    1130282270775959296
  • NII Book ID
    BA60423276
  • ISBN
    3540431438
  • Text Lang
    en
  • Country Code
    gw
  • Title Language Code
    en
  • Place of Publication
    • Berlin
  • Data Source
    • CiNii Books
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