64- to 256-megabit reticle generation : technology requirements and approaches

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Bibliographic Information

Title
"64- to 256-megabit reticle generation : technology requirements and approaches"
Statement of Responsibility
Gregory K. Hearn, editor
Publisher
  • SPIE Optical Engineering Press
Publication Year
  • c1994
Book size
27 cm
Series Name / No
  • pbk.
Other Title
  • Sixty-four to two hundred fifty-six-megabit reticle generation

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Notes

"Proceedings of a conference held 24 September 1993, Santa Clara, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology."

Includes bibliographical references and index

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