64- to 256-megabit reticle generation : technology requirements and approaches
Bibliographic Information
- Title
- "64- to 256-megabit reticle generation : technology requirements and approaches"
- Statement of Responsibility
- Gregory K. Hearn, editor
- Publisher
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- SPIE Optical Engineering Press
- Publication Year
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- c1994
- Book size
- 27 cm
- Series Name / No
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- pbk.
- Other Title
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- Sixty-four to two hundred fifty-six-megabit reticle generation
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Notes
"Proceedings of a conference held 24 September 1993, Santa Clara, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology."
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282270904918144
-
- NII Book ID
- BA28802013
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- ISBN
- 0819413577
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- LCCN
- 93046150
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- Web Site
- https://lccn.loc.gov/93046150
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TK7874
- DC20: 621.3815/31
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- Data Source
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- CiNii Books