Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California
Bibliographic Information
- Title
- "Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California"
- Statement of Responsibility
- Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
- Publisher
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- The Society
- Publication Year
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- c1987
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Includes bibliographies and index
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Details 詳細情報について
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- CRID
- 1130282270937001472
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- NII Book ID
- BA13293696
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- ISBN
- 0892528087
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- LCCN
- 87060741
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- Web Site
- https://lccn.loc.gov/87060741
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7874
- DC19: 621.3815/2
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- Subject
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- Data Source
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- CiNii Books