17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
CiNii
Available at 2 libraries
Bibliographic Information
- Title
- "17th European Conference on Mask Technology for Integrated Circuits and Microcomponents"
- Statement of Responsibility
- Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM)(Germany)
- Publisher
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- SPIE
- Publication Year
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- c2001
- Book size
- 28 cm
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Notes
Includes bibliographical references and indexes
"13-24 November 2000, Munich, Germany"
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Details 詳細情報について
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- CRID
- 1130282270956171776
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- NII Book ID
- BA58680990
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- ISBN
- 0819440396
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- [Bellingham, Wash.]
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- Data Source
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- CiNii Books