17th European Conference on Mask Technology for Integrated Circuits and Microcomponents

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Bibliographic Information

Title
"17th European Conference on Mask Technology for Integrated Circuits and Microcomponents"
Statement of Responsibility
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM)(Germany)
Publisher
  • SPIE
Publication Year
  • c2001
Book size
28 cm

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Notes

Includes bibliographical references and indexes

"13-24 November 2000, Munich, Germany"

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Details 詳細情報について

  • CRID
    1130282270956171776
  • NII Book ID
    BA58680990
  • ISBN
    0819440396
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • [Bellingham, Wash.]
  • Data Source
    • CiNii Books
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