16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

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Bibliographic Information

Title
"16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany"
Statement of Responsibility
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)
Publisher
  • SPIE
Publication Year
  • c2000
Book size
28 cm

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Notes

At head of title: Proceedings

Includes bibliographical references and index

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