Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
CiNii
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Bibliographic Information
- Title
- "Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A."
- Statement of Responsibility
- editors, Gerfield Zwicker ... [et al.]
- Publisher
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- Materials Research Society
- Publication Year
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- c2007
- Book size
- 24 cm
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Notes
"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref
Inclueds bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282271048374144
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- NII Book ID
- BA83960649
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- ISBN
- 9781558999510
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Warrendale, Pa.
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- Data Source
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- CiNii Books