Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A."
Statement of Responsibility
editors, Gerfield Zwicker ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2007
Book size
24 cm

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Notes

"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref

Inclueds bibliographical references and indexes

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