Bibliographic Information
- Title
- "Introduction to microelectronic fabrication"
- Statement of Responsibility
- Richard C. Jaeger
- Publisher
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- Addison-Wesley Pub. Co.
- Publication Year
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- 1993, c1988
- Book size
- 24 cm
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Notes
"Reprinted with corrections May, 1993."--T.p. verso
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282271169044864
-
- NII Book ID
- BA26303180
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- ISBN
- 0201146959
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- LCCN
- 86022128
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- Web Site
- https://lccn.loc.gov/86022128
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Reading, Mass. ; Tokyo
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- Classification
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- LCC: TK7874
- DC19: 621.381/73
- NDC8: 549.8
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- Data Source
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- CiNii Books