Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators

Web Site CiNii Available at 29 libraries

Bibliographic Information

Title
"Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators"
Statement of Responsibility
Ian W. Boyd
Publisher
  • Springer-Verlag
Publication Year
  • c1987
Book size
24 cm
Series Name / No
  • : U.S.
  • : Germany

Search this Book/Journal

Notes

Bibliography: p. 287-313

Includes index

Related Books

See more

Details 詳細情報について

Back to top