Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California

CiNii Available at 1 libraries

Bibliographic Information

Title
"Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California"
Statement of Responsibility
Régine G. Tarascon-Auriol chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Publisher
  • SPIE
Publication Year
  • c1997
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

  • CRID
    1130282271342155648
  • NII Book ID
    BA85952051
  • ISBN
    0819424633
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
Back to top