EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

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Bibliographic Information

Title
"EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany"
Statement of Responsibility
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)
Publisher
  • SPIE
  • VDE Verlag GmbH
Publication Year
  • c2005
Book size
28 cm
Other Title
  • European Mask and Lithography Conference
  • European Conference on Mask Technology for Integrated Circuits and Microcomponents
  • Mask and lithography

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Notes

Includes bibliographical references and author index

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