Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas

Name: Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas
Author: Motamedi, M. Edward, Bailey, Wayne E., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.)

Motamedi, M. Edward, Bailey, Wayne E., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.)

Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas

Web Site CiNii Available at 2 libraries

Motamedi, M. Edward
Bailey, Wayne E.
Society of Photo-optical Instrumentation Engineers
Semiconductor Equipment and Materials International
National Institute of Standards and Technology (U.S.)

Bibliographic Information

Title: "Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas"

Statement of Responsibility: M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology

Publisher

SPIE

Publication Year

1996

Book size: 28 cm

Series Name / No

pbk.

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Includes bibliographical references

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