Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, O.J. Glembocki ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1994
Book size
24 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282271447005568
  • NII Book ID
    BA23153172
  • ISBN
    1558992235
  • LCCN
    94020397
  • Web Site
    https://lccn.loc.gov/94020397
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pittsburgh
  • Data Source
    • CiNii Books
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