Optical/laser microlithography : 3-5 March 1993, San Jose, California

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Bibliographic Information

Title
"Optical/laser microlithography : 3-5 March 1993, San Jose, California"
Statement of Responsibility
John D. Cuthbert Chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1993
Book size
28 cm
Series Name / No
  • pt. 1

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Notes

Includes bibliographies and index

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Details 詳細情報について

  • CRID
    1130282271481774336
  • NII Book ID
    BA27107315
  • ISBN
    0819411612
  • LCCN
    93084068
  • Web Site
    https://lccn.loc.gov/93084068
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
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