Dielectric material integration for microelectronics

Name: Dielectric material integration for microelectronics
Author: Brown, William D., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting

Brown, William D., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting

Dielectric material integration for microelectronics

Web Site CiNii 所蔵館 2館

書誌事項

タイトル: "Dielectric material integration for microelectronics"

責任表示: editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]

出版者

Electrochemical Society

出版年月

c1998

書籍サイズ: 23 cm

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"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface

Includes bibliographical references and index

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Dielectric material integration for microelectronics

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