Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A."
Statement of Responsibility
editors, Hans-Joachim L. Gossmann ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • 1999
Book size
24 cm

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Notes

Includes bibliographical references and index

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