Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998
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Bibliographic Information
- Title
- "Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998"
- Statement of Responsibility
- editors. M. Kittler, O. Breitenstein, A. Endros and W. Schroter
- Publisher
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- Scitec Publications Ltd.
- Publication Year
-
- 1998
- Book size
- 25 cm
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Notes
Volumes 63-64 of Solid State Phenomena, ISSN1012-0394
Includes bibliographies and index
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Details 詳細情報について
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- CRID
- 1130282271572078464
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- NII Book ID
- BA46349537
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- ISBN
- 390845039X
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Uetikon-Zuerich
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- Data Source
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- CiNii Books