Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998

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Bibliographic Information

Title
"Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998"
Statement of Responsibility
editors. M. Kittler, O. Breitenstein, A. Endros and W. Schroter
Publisher
  • Scitec Publications Ltd.
Publication Year
  • 1998
Book size
25 cm

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Notes

Volumes 63-64 of Solid State Phenomena, ISSN1012-0394

Includes bibliographies and index

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Details 詳細情報について

  • CRID
    1130282271572078464
  • NII Book ID
    BA46349537
  • ISBN
    390845039X
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Uetikon-Zuerich
  • Data Source
    • CiNii Books
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