Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
Bibliographic Information
- Title
- "Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications"
- Statement of Responsibility
- edited by Klaus K. Schuegraf
- Publisher
-
- Noyes Publications
- Publication Year
-
- c1988
- Book size
- 25 cm
- Other Title
-
- Hand book of thin-film deposition processes and techniques
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Notes
Includes bibliographies and index
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Details 詳細情報について
-
- CRID
- 1130282271774042496
-
- NII Book ID
- BA07074756
-
- ISBN
- 0815511531
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- LCCN
- 87034702
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- Web Site
- https://lccn.loc.gov/87034702
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Park Ridge, N.J., U.S.A.
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- Classification
-
- LCC: TK7872.T55
- DC19: 621.381/72
-
- Data Source
-
- CiNii Books
