Cleaning Technology in Semiconductor Device Manufacturing IX
Bibliographic Information
- Title
- "Cleaning Technology in Semiconductor Device Manufacturing IX"
- Statement of Responsibility
- editors, J. Ruzyllo ... [et al.] ; sponsoring divisions, Electronics and Photonics, Dielectric Science and Technology
- Publisher
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- Electrochemical Society
- Publication Year
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- c2005
- Book size
- 24 cm
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Notes
"... held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005." -- on pref.
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282271804674304
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- NII Book ID
- BA81681826
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- ISBN
- 1566774292
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- LCCN
- 2005930731
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- Web Site
- https://lccn.loc.gov/2005930731
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books