Cleaning Technology in Semiconductor Device Manufacturing IX

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Bibliographic Information

Title
"Cleaning Technology in Semiconductor Device Manufacturing IX"
Statement of Responsibility
editors, J. Ruzyllo ... [et al.] ; sponsoring divisions, Electronics and Photonics, Dielectric Science and Technology
Publisher
  • Electrochemical Society
Publication Year
  • c2005
Book size
24 cm

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Notes

"... held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005." -- on pref.

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282271804674304
  • NII Book ID
    BA81681826
  • ISBN
    1566774292
  • LCCN
    2005930731
  • Web Site
    https://lccn.loc.gov/2005930731
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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