Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida
Bibliographic Information
- Title
- "Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida"
- Statement of Responsibility
- Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society
- Publisher
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- SPIE
- Publication Year
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- c1987
- Book size
- 28 cm
- Series Name / No
-
- pbk.
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Notes
Includes biblographies
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Details 詳細情報について
-
- CRID
- 1130282271846512768
-
- NII Book ID
- BA13205280
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- ISBN
- 089252832X
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- LCCN
- 87061010
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- Web Site
- https://lccn.loc.gov/87061010
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7871.85
- DC19: 621.3815/2
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- Subject
-
- Data Source
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- CiNii Books
