Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, T.J. Mountziaris ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1994
Book size
24 cm

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Notes

Sponsors: Army Research Office, Office of Naval Research

Includes bibliographical references and index

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