Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA"
Statement of Responsibility
Iraj Emami, Kenneth W. Tobin, Jr. ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc
Publisher
  • SPIE
Publication Year
  • c2006
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographical references and author index

Related Books

See more

Details 詳細情報について

Back to top