Plasma processing XIV : proceedings of the international symposium

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Bibliographic Information

Title
"Plasma processing XIV : proceedings of the international symposium"
Statement of Responsibility
editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics
Publisher
  • Electrochemical Society
Publication Year
  • c2002
Book size
24 cm

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Notes

Includes bibliographical references and indexes

"The symposium, cosponsored by the Dielectric Science & Technology and Electronics divisions, was held as part of the 201st Centennial Meeting of The Electrochemical Society, Inc., in Philadelphia, PA, May 12-17, 2002"--on pref

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Details 詳細情報について

  • CRID
    1130282271993243520
  • NII Book ID
    BA60593447
  • ISBN
    1566773415
  • LCCN
    2002112473
  • Web Site
    https://lccn.loc.gov/2002112473
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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