Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995

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Bibliographic Information

Title
"Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995"
Statement of Responsibility
editors, H. Richter, M. Kittler and C. Claeys
Publisher
  • SciTec Publications
Publication Year
  • 1995
Book size
25 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282272030028928
  • NII Book ID
    BA26129913
  • ISBN
    390845011X
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Untermuhleweg, Switzerland
  • Data Source
    • CiNii Books
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