MEMS : design and fabrication

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Bibliographic Information

Title
"MEMS : design and fabrication"
Statement of Responsibility
edited by Mohamed Gad-el-Hak
Publisher
  • CRC, Taylor & Francis
Publication Year
  • 2006
Book size
26 cm
Series Name / No
  • : hardcover

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Notes

The MEMS handbook, 2nd ed

"A CRC Press book"--Back cover

Includes bibliographical references and index

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