15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

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Bibliographic Information

Title
"15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany"
Statement of Responsibility
Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm
Other Title
  • Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents
  • European Conference on Mask Technology for Integrated Circuits and Microcomponents
  • Mask technology for integrated circuits and microcomponents

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Notes

Includes bibliographical references and index

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