Bibliographic Information
- Title
- "Poly-SiGe for MEMS-above-CMOS Sensors"
- Statement of Responsibility
- Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw
- Publisher
-
- Springer
- Publication Year
-
- c2014
- Book size
- 25 cm
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Details 詳細情報について
-
- CRID
- 1130282272421450624
-
- NII Book ID
- BB15832449
-
- ISBN
- 9789400767980
-
- LCCN
- 2013940084
-
- Web Site
- https://lccn.loc.gov/2013940084
-
- Text Lang
- en
-
- Country Code
- ne
-
- Title Language Code
- en
-
- Place of Publication
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- Dordrecht
-
- Classification
-
- LCC: TK7875
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- Subject
-
- LCSH: Engineering
- LCSH: Systems engineering
- LCSH: Optical materials
- LCSH: Surfaces (Physics)
- LCSH: Physics
-
- Data Source
-
- CiNii Books
