Proceedings of the Sixth Symposium on Plasma Processing

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Bibliographic Information

Title
"Proceedings of the Sixth Symposium on Plasma Processing"
Statement of Responsibility
edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho
Publisher
  • Electrochemical Society
Publication Year
  • c1987
Book size
23 cm
Other Title
  • Plasma processing

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Notes

Includes bibliographical references and indexes

"... held in San Diego, CA from Oct. 19-24, 1986" -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

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