Excimer beam applications, 6 September 1988, Boston, Massachusetts

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Bibliographic Information

Title
"Excimer beam applications, 6 September 1988, Boston, Massachusetts"
Statement of Responsibility
Anthony N. Pirri, Bernhard P. Piwczyk, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Applied Optics Laboratory/New Mexico State University ... [et al.]
Publisher
  • SPIE--International Society for Optical Engineering
Publication Year
  • c1988
Book size
28 cm

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Notes

Includes bibliographies and index

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Details 詳細情報について

  • CRID
    1130282272452878848
  • NII Book ID
    BA09832979
  • ISBN
    0819400335
  • LCCN
    88062998
  • Web Site
    https://lccn.loc.gov/88062998
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
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