Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

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Bibliographic Information

Title
"Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan"
Statement of Responsibility
Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm

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Notes

"Papers presented at Photomask Japan '94 held at the Kanagawa Science Park in Kawasaki, Japan, on 22 April 1994"--P. ix

Includes bibliographical references and index

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