Microlithography : science and technology

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Bibliographic Information

Title
"Microlithography : science and technology"
Statement of Responsibility
edited by Kazuaki Suzuki, Bruce W. Smith
Publisher
  • CRC Press, Taylor & Francis Group
  • 2nd ed.
Publication Year
  • c2007
Book size
27 cm
Series Name / No
  • : alk. paper

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Notes

Includes bibliographical references and index

HTTP:URL=http://www.loc.gov/catdir/toc/ecip071/2006031516.html Information=Table of contents only

HTTP:URL=http://www.loc.gov/catdir/enhancements/fy0701/2006031516-d.html Information=Publisher description

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