Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

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Bibliographic Information

Title
"Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France"
Statement of Responsibility
Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, CNRS-INPG-UJF (France)
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm
Series Name / No
  • pt. 1
  • pt. 2

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Notes

Includes bibliographical references and index

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