Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Bibliographic Information
- Title
- "Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France"
- Statement of Responsibility
- Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, CNRS-INPG-UJF (France)
- Publisher
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- SPIE
- Publication Year
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- c1999
- Book size
- 28 cm
- Series Name / No
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- pt. 1
- pt. 2
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282272653852416
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- NII Book ID
- BA80138498
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- ISBN
- 0819431540
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- LCCN
- 00689203
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- Web Site
- https://lccn.loc.gov/00689203
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Subject
-
- Data Source
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- CiNii Books