Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.

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書誌事項

タイトル
"Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A."
責任表示
editors, Mikhail R. Baklanov ... [et al.]
出版者
  • Materials Research Society
  • Cambridge University Press
出版年月
  • 2012
書籍サイズ
24 cm
シリーズ名/番号
  • : hard

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注記

"Symposium O, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics', held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California"--P. ix

Includes bibliographical references and indexes

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