Reduced thermal processing for ULSI

Web Site CiNii Available at 8 libraries

Bibliographic Information

Title
"Reduced thermal processing for ULSI"
Statement of Responsibility
edited by Roland A. Levy
Publisher
  • Plenum Press
Publication Year
  • c1989
Book size
26 cm

Search this Book/Journal

Notes

"Published in cooperation with NATO Scientific Affairs Division."

"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso

Includes bibliographical references

Related Books

See more

Details 詳細情報について

Back to top