Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

CiNii Available at 2 libraries

Bibliographic Information

Title
"Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A."
Statement of Responsibility
editors: Ashok Kumar ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2010
Book size
24 cm

Search this Book/Journal

Notes

Other editors: C. Fred Higgs III, Chad S. Korach, Subramanian Balakumar

Includes bibliographical references and indexes

"..., 'Science and technology of chemical mechanical planarization (CMP),' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.

Related Books

See more

Details 詳細情報について

  • CRID
    1130282272842564992
  • NII Book ID
    BB0223199X
  • ISBN
    9781605111308
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, Pa.
  • Data Source
    • CiNii Books
Back to top