Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
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Bibliographic Information
- Title
- "Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A."
- Statement of Responsibility
- editors, Frank W. DelRio ... [et al.]
- Publisher
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- Materials Research Society
- Cambridge University Press
- Publication Year
-
- 2011
- Book size
- 24 cm
- Series Name / No
-
- : hard
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Notes
"Symposium S, 'Microelectromechanical Systems--Materials and Devices IV,' held November 29-December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts..."--Pref
Includes bibliographical references and indexes
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Details 詳細情報について
-
- CRID
- 1130282272886527360
-
- NII Book ID
- BB06337143
-
- ISBN
- 9781605112763
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Warrendale, Pa.
- Cambridge
-
- Classification
-
- LCC: TK7875
-
- Data Source
-
- CiNii Books
