Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Web Site CiNii Available at 2 libraries

Bibliographic Information

Title
"Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films"
Statement of Responsibility
edited by Vik J. Kapoor, Kevin T. Hankins ; [sponsored by the] Dielectrics and Insulation and Electronics Divisions
Publisher
  • Electrochemical Society)
Publication Year
  • c1987
Book size
23 cm
Other Title
  • Silicon nitride and silicon dioxide thin insulating films

Search this Book/Journal

Notes

Spine title: Silicon nitride and silicon dioxide thin insulating films

Includes bibliographies and indexes

Related Books

See more

Details 詳細情報について

Back to top