High Purity Silicon VI : proceedings of the sixth International Symposium
Bibliographic Information
- Title
- "High Purity Silicon VI : proceedings of the sixth International Symposium"
- Statement of Responsibility
- editors C.L. Claeys ... [et al.] ; sponsored by the Electrochemical Society, Inc., Electronics Division
- Publisher
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- Published in cooperation with SPIE-the International Society for Optical Engineering
- Electrochemical Society, c2000
- Book size
- 24 cm
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Notes
"... held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000. The Symposium, sponsored by the Electronics Division of the Electrochemical Society and by SPIE"--on pref
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282273133826304
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- NII Book ID
- BA54509162
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- ISBN
- 1566772842
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- LCCN
- 00106821
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- Web Site
- https://lccn.loc.gov/00106821
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
- Pennington, N.J.
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- Classification
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- LCC: TK7871.15.S55
- DC21: 621.3815/2
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- Subject
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- Data Source
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- CiNii Books