Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th International Autumn Meeting, Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, September 21-26, 2003
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Bibliographic Information
- Title
- "Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th International Autumn Meeting, Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, September 21-26, 2003"
- Statement of Responsibility
- edited by H. Richter and M. Kittler
- Publisher
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- Scitec Publications
- Publication Year
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- c2004
- Book size
- 25 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282273283619712
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- NII Book ID
- BB16175274
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- ISBN
- 9783908450825
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Uetikon-Zurich, Switzerland
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- Data Source
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- CiNii Books