High density plasma sources : design, physics and performance
Bibliographic Information
- Title
- "High density plasma sources : design, physics and performance"
- Statement of Responsibility
- edited by Oleg A. Popov
- Publisher
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- Noyes Publications
- Publication Year
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- c1995
- Book size
- 25 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282273348283904
-
- NII Book ID
- BA27808127
-
- ISBN
- 0815513771
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- LCCN
- 95004918
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- Web Site
- https://lccn.loc.gov/95004918
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Park Ridge, NJ
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- Classification
-
- LCC: QC718.5.D4
- DC20: 621.044
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- Subject
-
- LCSH: Plasma density
- LCSH: Plasma generators
- LCSH: High temperature plasmas
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- Data Source
-
- CiNii Books
