Handbook of silicon based MEMS materials and technologies
CiNii
Available at 3 libraries
Bibliographic Information
- Title
- "Handbook of silicon based MEMS materials and technologies"
- Statement of Responsibility
- edited by Markku Tilli ... [et al.]
- Publisher
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- Elsevier
- 3rd ed
- Publication Year
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- c2020
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Other editors: Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1131130857712537856
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- NII Book ID
- BC0002373X
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- ISBN
- 9780128177860
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- Text Lang
- en
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- Country Code
- ne
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- Title Language Code
- en
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- Place of Publication
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- Amsterdam
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- Classification
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- DC23: 621.381
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- Subject
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- LCSH: Microelectromechanical systems
- LCSH: Silicon
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- Data Source
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- CiNii Books