Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

Details 詳細情報について

• CRID

  1360003446854821504

• NII Article ID

  210000066994

• DOI

  10.1143/jjap.48.06fk10

• ISSN

  13474065

  00214922

  http://id.crossref.org/issn/13474065

• Web Site

  https://iopscience.iop.org/article/10.1143/JJAP.48.06FK10

  https://iopscience.iop.org/article/10.1143/JJAP.48.06FK10/pdf

• Data Source

  • Crossref
  • CiNii Articles