Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

DOI PDF 7 Citations

Journal

Journal of Microelectromechanical Systems

Journal of Microelectromechanical Systems 24 (4), 831-838, 2015-08

Institute of Electrical and Electronics Engineers (IEEE)

Citations (7)*help

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Details 詳細情報について

CRID

1360011144004391808
DOI

10.1109/jmems.2014.2353855
ISSN

19410158

10577157
Web Site

http://xplorestaging.ieee.org/ielx7/84/7172569/06907988.pdf?arnumber=6907988
Data Source
- Crossref

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